Glossary:

Business Carrier: The product (description), from which the technical specification of the demonstrator will be derived. The business carrier is also used to indicate the market relevance of the demonstrator.

Demonstrator: A device made using elements of the Technology Platform to demonstrate and prove the technical capability of those elements.

Design kits: Set of libraries used for IC-design. The design kit contains a device simulator, a lay-outer, and a schematics generator (and other tools).

Device simulator A software tool that simulates the device and generates input for the design kit after comparison with real measurements.

EUCEMAN: European Center for Micro and Nano Reliability, hosted by IZM/Fraunhofer

MEMS: Micro Electro Mechanical Systems

MST: Micro Systems Technology

MtM: More than Moore

SiP: Systems in Package

FP: Framework Program

Eniac: European Nanoelectronics Initiative Advisory Council

ITRS: International Technology Roadmap of Semiconductors

Medea+: Industry-driven pan-European program for advanced co-operative R&D in microelectronics

MEOST: Multiple Environment Overstress Test, a method to test product reliability accelerated, see MEOST link

NIMR: Netherlands Institute of Metal/Material Research

NWO: Nederlandse Organisatie voor Wetenschappelijk Onderzoek

Process Module: Single process description, or set of process sequences, for MEMS product manufacturing, including wafer manufacturing, back-end, packaging, assembly, testing. (e.g. metal deposition and patterning, packaging)

STW: Stichting Technisch-Wetenschappelijk onderzoek

Technology Platform: A virtual box containing process modules and design kits. A product designer can use this box to make many different types of (MEMS) devices.

Updated: 18 April 2007

contact: info@MEMSland.nl

jan_eite.bullema@tno.nl