MEMSland Dissimination and Publications

A MEMSland Symposium will be organized 3 December 2009 at TNO Science and Industry in Eindhoven: pre-register now at: mailto:info@memsland.nl

 Scientific Publications from MEMSland

#	Company	Author	Conference / Journal	Title	Date
1	TUE/Stan Ackermans Institute/ICT	Alessandro Murroni	PDE Thesis	“MEMS-base oscillators: is the quartz crystal age coming to its end?”	Sept 2007, ISBN 978-90-444-0716-7.
2	NXP	P.G. Steeneken, J.J.M. Ruigrok, S. Kang, J.T.M. van Beek, J.Bontemps, J.J. Koning	COMSOL Conference	“Parameter Extraction and Support-Loss in MEMS Resonators”	2007
3	NXP	S. Bendida	Masters Thesis	“MEMS Resonators for consumer market”	July 2007
4	NXP	Mehdi El Ghorba	Master thesis’ report for programme Micro and Nanotechnologies for ICT, at University Politecnico di Torino, INPGrenoble and EPFLausanne	“MEMS Oscillator System Level Modelling”	Sept. 4th, 2007
5	NXP	J.T.M. van Beek, G.J.A.M. Verheijden, G.E.J. Koops, K.L. Phan, C. van der Avoort, J. van Wingerden, D. Ernur Badaroglu, J.J.M. Bontemps	Int. Conference IEDM 2007	“Scalable 1.1GHz fundamental mode piezo-resistive silicon MEMS resonator”	2007
6	TUE	Mathijs Suijlen	End report Design Program SAI/ DTI, Eindhoven University of Technology	“Design of a MEMS pressure sensor”	Sept 2007, ISBN 978-90-444-0750-1
7	NXP	W.D. van Driel et al.	ECTC conference	“Mechanical Reliability of MEMS Packages”
8	NXP	F, Morichetti, A. Melloni, M. Martinelli, R.G.Heideman, A. Leinse, D.H. Geuzebroek, A. Borreman	Journal of Lightwave Technologies, vol 25(9), 2007	Box-Shaped Dielectric Waveguides: A New Concept in Integrated Optics	vol 25(9), 2007
9	NXP	R. Lanz et al	IEEE-USS07 conference, poster contribution to the , October 2007, New York	Uniformity Optimization of the Electromechanical Coupling Coefficient in AlN Based Bulk Acoustic Wave Resonators	October 2007
10	NXP	R. Lanz, L. Senn, L. Gabathuler, W. Huiskamp, R. C. Strijbos, F. Vanhelmont	IEEE Ultrasonics Symposium	Proceedings 2007 IEEE Ultrasonics Symposium, 1429-1432	2007
11	TNO	Marcel Meuwissen, Monique van den Nieuwenhof, Henk Steijvers, Adri van der Waal, Tom Bots	8th. Int. Conf. on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2007	Validation of constitutive models for electrically conductive adhesives	2007
12	NXP	R.W. Herfst, P.G. Steeneken, and J. Schmitz	MEMS 2008 Conference	'Identifying degradation mechanisms in RF-MEMS Capacitive Switches’	2008
13	Philips Apptech	Jeroen Bielen, Sander Noijen	2007 ANSYS Regional Conference, 8-9 November 2007 in Antwerpen	"Multiphysics analysis of RF MEMS devices"	2007
14	Cavendish	C. G. Smith*a, R. van Kampenc, J. Poppc, D. Lacyb, D. Pinchettib, M. Renaultb, V. Joshib and M. A. Beunders		‘Nano-mechanical cantilever arrays for low-power and low-voltage embedded nonvolatile memory applications’	Feb. 12, 2007
15	NXP	Strijbos et. Al.	ECTC 2007, Reno		2007
16	NXP	Lobeek et. Al.	IMS 2007, Honolulu		2007
17	NXP	Vanhelmont et.al.	IEEE Ultrasonics Symposium, Vancouver	p 333 - 336	2006
18	NXP	R. W. Herfst, P.G. Steeneken, J. Schmitz	IEEE Int. Reliability Physics Symposium (IRPS) 2007	Time and Voltage Dependence of dieletric chariging in RF MEMS capacitive switches	2007
19	NXP	H.M.R. Suy, H.G.A. Huizing, P.G. Steeneken, O.I . Yanson	Nanotech 2007, Santa Clara	A compact scalable circuit model for RF MEMS switches	2007
20	NXP	Marcel van Gils, Jeroen Bielen, Gavin McDonald	Proceddings of Eurosime 2007, London	Evaluation of creep in RF MEMS devices	2007
21	Lionix	Melloni F., Morichetti R., Costa G., Cusmai R.G., Heideman R., Mateman, Geuzenbroek D., Borreman A.	Proc. European conferenc for integrated optics, Kopemhagen 2007	Triplex; a new concept in optical waveguiding	2007
22	Lionix	R.G. Heideman, D. Geuzebroek, A. Leinse, A. Melloni, F. Morichetti, C. Roelaffzen, A. Meijerink, L. Zhuang, W. van Etten, E. Klein, A. Driessen	Proc. European conferenc for integrated optics, Kopemhagen 2007	Low loss, high contrast optical waveguides, based on CMOS compatible LPCVD processing	2007
23	TUD / NXP	W.D. van Driel, D.G. Yang, C.A. Yuan, M. van Kleef, G.Q. Zhang	Journal of Micro Electronics and Reliability 47, 2007, p 1823 -1826	Mechanical reliability challenges for MEMS packages	2007
24	TUD / NXP	W.D. van Driel, D.G. Yang, C.A. Yuan, F. Theunis, G.Q. Zhang	ECTC Conference Orlando	Mechanical Challenges for MEMS Packaging: Capping	2008
25	NXP	S. Bendida, J.J. Koning, J.J.M. Bontemps, J.T.M. van Beek, D. Wu, M.A.J. van Gils, S. Nath	ESREF2008	Temperature Stability of a Piezo-Resistive MEMS Resonator including Self-Heating	2008
26	TUD / NXP	J.J.M. Zaal, W.D. van Driel, S. Bendida, J.J. Koning, Q. Li, J.T.M. van Beek, G.Q. Zhang,	ESREF2008	“Packaging influences on the reliability of MEMS resonators”, accepted for presentation at	2008
27	TUD / NXP	W.D. van Driel, J.J.M. Zaal, D.G. Yang, M. van Kleef, G.Q. Zhang,	Proceedings of the 58th Electronic Components and Technology Conference, Florida	“Mechanical reliability of MEMS packages”	2008
28	TUD / NXP / Epcos	R.W. Herfst, P.G. Steeneken, and J. Schmitz	IEEE 21st International Conference on Micro Electro Mechanical Systems	Identifying degradation mechanisms in RF MEMS capacitive switches, IEEE 21st International Conference on Micro Electro Mechanical	2008
29	TUD / NXP / Epcos	R.W. Herfst, P.G. Steeneken, J. Schmitz, A.J.G. Mank, and M. van Gils	IEEE International Reliability Physics Symposium, 2008, pp. 492-495	Kelvin probe study of laterally inhomogeneous dielectric charging and charge diffusion in RF MEMS capacitive switches	2008
30	Epcos	R.W. Herfst, P.G. Steeneken, H.G.A. Huizing and J. Schmitz.	Trans. Semiconductor Manufacturing, vol. 21, no.2, May 2008, pp. 148-153	“Center-shift method for the characterization of dielectric charging in RF MEMS capacitive switches”	2008
31	Epcos	Peter Steeneken, Rodolf Herfst, Hilco Suy, Martijn Goossens, Joost van Beek, Jeroen Bielen, Jiri Stulemeijer and Jurriaan Schmitz	Future Fab International, Issue 24, pp. 24-30, Jan. 2008	“RF MEMS Switches for Mobile Communication”	2008
32	Epcos	H.M.R. Suy, R.W. Herfst, P.G. Steeneken, J. Stulemeijer and J.A. Bielen	Proc. Nanotech 2008, accepted for oral presentation	“The static behavior of RF MEMS capacitive switches in contact”	2008
33	Epcos	P.J. van der Wel, J. Stulemeijer, J.A. Bielen, F. Theunis, A. den Dekker M.A.J. van Gils and R.J. Havens	IRPS2008	“Hermeticity testing of capacitive RF MEMS switches”	2008
34	Epcos	Jeroen Bielen, Jiri Stulemeijer, Deepak Ganjoo, Dale Ostergaard, Sander Noijen	Keynote at Eurosime2008	‘Fluid-electrostatic-mechanical modeling of the dynamic response of RF-MEMS capacitive switches’	2008
35	TUD / NXP / Epcos	Daoguo Yang, Jeroen Bielen, F. Theunis, W. D. van Driel, G.Q. Zhang	Keynote at Eurosime2008	“Die Fracture Probability Prediction and Design Guidelines for Laminate-Based Over-Molded Packages”	2008
36	TNO	P.Bolt, J.E. Bullema, R. Korbee, R. Kusters	4M 2008	Feasibility of polymers for wafer scale capping of RF MEMS	2008
37	NXP / TU/e	M.A.G. Suijlen, J.J. Koning, M.A.J. Van Gils, H.C.W. Beijerinck	Eurosensors	Squeeze film damping in the free molecular region with full thermal	2008
38	NXP / TU/e	S. Bendida*, J.J. Koning, J.J.M. Bontemps, J.T.M. van Beek, D. Wu, M.A.J. van Gils 1, S. Nath	Microelectronics Reliability 48 (2008) 1227–1231	Temperature stability of a piezoresistive MEMS resonator including self-heating	2008
39	C2V	Harm van Weerden, Gert-Jan Burger, Job Elders	American Laboratory, 14 sept 2008	Fast Micro-GC Capabilities Based on a Microintegration Technology Platform	2008

Photo 1: The MEMSland Stand at the Semicon2007 in Stuttgart

Dissimination Activities

#	Company	Event	Date	Type of Dissimination
1	NXP	Ir. J.J.M. Bontemps, NXP Semiconductors Nijmegen, “MEMS oscillators: a one-in-a-million opportunity”, presentation Eindhoven University of Technology, 13 September 2007.	13 september 2007	presentation Eindhoven University of Technology, 13 September 2007.
2	?	Drs. M. Suijlen, “Design of a MEMS pressure sensor”, presentation Eindhoven University of Technology, 22 August 2007.	22 August 2007	presentation Eindhoven University of Technology
3	Boschman	SMT Neurenberg	2007
4	Boschman	Micro Nano Conference Wageningen	November 2007	presentation
5	Boschman	Semicon 2007, Stuttgart	October 2007	stand and presentation
6	Boschman	Transducer Fair, Lyon	2007	stand and presentation
7	MA3 Solutions	Semicon 2007, Stuttgart	October 2007	stand
8	NXP	Semicon 2007, Stuttgart	October 2007	stand
9	ALSI	Semicon 2007, Stuttgart	October 2007	stand
10	Philips Applied Technology	Semicon 2007, Stuttgart	October 2007	stand
11	TNO	Semicon 2007, Stuttgart	October 2007	stand
12	C2V	CIGRE 2007 in Brugge, Belgium.	October 8-10, 2007	presentation
13	C2V	EXPO 2007 in Houston, TX, USA.	October 2 - 4, 2007	Presentation by Dr J. Elders: Novel fast micro gas chromatograph for on-line process control.
14	C2V	TranSec World Expo, Expo XXI in Amsterdam.	27 - 28 June 2007	presentation
15	C2V	16th International Conference on Ion Mobility Spectrometry, in Mikkeli, Finland.	22 - 26 July 2007	Presentation by Dr J. Elders: Novel miniaturized fast gas chromatograph as front-end for detector.
16	C2V	TWA conference 'Innovative technologies for the security of citizens and infrastructure' in WTC Rotterdam.	17 April 2007	presentation
17	C2V	58th Annual Pittsburgh Conference on Analytical Chemistry and Applied Spectroscopy , McCormick Place in Chicago, Illinois, USA. An abstract was resented at the Pitcon: "Gas Chromatography: Petrochemical Applications".	February 25 - March 1, 2007	Presentation by Dr V. Spiering: Novel miniaturized fast gas chromatograph for gas&oil analysis. Presentation by Dr J. Elders: Novel miniaturized fast gas chromatograph for security applications.
18	C2V	4th International Gas Analysis Symposium & Exhibition, in Rotterdam. A presentation was given by Dr J. Elders. "Novel miniaturized fast gas chromatograph for natural gas analysis."	February 14 - 16, 2007	Presentation by Dr J. Elders: Novel miniaturized fast gas chromatograph for natural gas analysis.
19	C2V	Point One Symposium	27 maart 2007	presentation
20	NXP	Point One Symposium	27 maart 2007	presentation
21	Boschman	Semicon 2007, Stuttgart	October 2007	Film assisted molding, met een beschrijving van de Memsland activiteiten
22	Boschman	Chitec 2008	May 2008	Film assisted molding, met een beschrijving van de Memsland activiteiten
23	Phoenix	EurosensorsXXI / Transducers2007 in Lyon geweest	2007	presentation
24	Boschman	SMT Neurenberg	2008	Stand
25	Boschman	Semicon West	2008	Stand
26	Boschman	Meptec Mems Symposium	may 2008	Stand
27	C2V	Sensors EXPO & conference	June 9-11, 2008, Rosemont Illinois (USA)	Booth presentation
28	C2V	The 32nd International Symposium on Capillary Chromatography (ISCC)	May 27-30, 2008 in the Congress Centre, Riva del Garda, (Italy)	Booth presentation
29	C2V	Het Instrument	May 20-23, 2008 Utrecht (Netherlands).	Booth presentation and participation in Point-One stand
30	C2V	Salon L'analyse industrielle	February 5-7, 2008, Paris (France)	Booth presentation (zie ook foto's)
31	C2V	IFPAC ®2008 22nd International Forum Process Analytical Technology	January 27-30, 2008, Baltimore, Maryland USA	Presentation by Dr J. Elders: Novel NESSI compatible fast micro GC for process control.
32	C2V	Igamed workshop: Intelligente Gassensoren in der Analytik und Medizin	April 25 2007, Schwering, Germany	Presentation by V. Spiering: Fast GC technology for medical applications?

Photo 2,3 and 4 MEMSland partners C2V and Boschman at various trade fairs in 2008

33	Boschman	Nanosolutions, Fankfurt	nov-08		Yes
34	C2V	Job Elders	Innoversum	Oral presentation by C2V's CEO Job Elders on micro gas analysis	2009
35	C2V	Job Elders, Vincent Spiering	Sensors EXPO & conference, June 8 - 10, Rosemont Illionois	Booth presentation	2009
36	C2V	Job Elders, Vincent Spiering	Achema 2009, 29st Int. Exhibit-Congress on Chemical Engineering, Environmental Protection and Biotechnology, May 11 - 15, 2009, Houston, Frankfurt am Main, Germany	Booth presentation	2009
37	C2V	Job Elders, Vincent Spiering	ISA EXPO 2009, April 19 - 23, 2009, Houston, TX, USA	Booth presentation and oral presentation on NeSSI™ III miniaturized Gas Chromatograph	2009
38	C2V	Job Elders, Vincent Spiering	Pittcon: 59th Annual Pittsburgh Conference on Analytical Chemistry and Applied Spectroscopy, March 8 -13, 2009, Chicago, Illinois, USA	Booth presentation and oral presentation on NeSSI™ III miniaturized Gas Chromatograph	2009
39	C2V	Job Elders	IFPAC 2009 International Forum Process Analytical Technology January 26-28, 2009, Baltimore, Maryland USA	Oral presentation by Dr J. Elders: Novel NESSI compatible fast micro GC for process control.	2009
40	C2V	Job Elders	GAS 2009, Industrial Analysis Exhibition February 11-13, 2009, Rotterdam, The Netherlands	Booth presentation and oral presentation on micro Gas Analyzer: C2V-200	2009
41	C2V	Job Elders	Salon L'analyse industrielle, Industrial Analysis Exhibition February 3-5, 2009, Paris (France)	Booth presentation and oral presentation on First NeSSI™III reconfigurable Gas Analyzer: C2V-200	2009

Photo 5,6,7 and 8 C2V at various trade fairs in 2009

Status Dissimation Activities

Archive:

= < 2006

2007

2008

2009

2010 

Photo 10 MEMSland Stand at the Point One Event March 2009 in the Evoluon in Eindhoven.

 Contact: info@memsland.nl

Version: 3 July 2009